WAFERMAP
Version 3.71
Release date: Jan 9, 2023
Changes:
- Update of Users Guide
Version 3.70
Release date: Jan 3, 2023
Changes:
- Update of 3D Bar Plot - Plot Options dialogue box
Version 3.66
Release date: Jun 6, 2022
Changes:
- Update of 2D Plot handling
Version 3.65
Release date: May 12, 2021
Changes:
- Update of Rigaku 310Fab Import filter for WAFERMAP
- "Set Default" button for General Lot Options implemented
Version 3.61
Release date: Feb 11, 2021
Changes:
- Implementation of Rigaku 310Fab Import filter for WAFERMAP
- Fixing of a problem with General Plot Options and new Win 10 releases
Version 3.60
Release date: Feb 15, 2019
Changes:
- Implementation SpectraFilm F1 Import filter for WAFERMAP
- Implementation of ASCII Import Options as additional General Import Options
- Update of ActiveX interface
Version 3.57
Release date: Jun 16, 2015
Changes:
- Update of default file name extension in Save if *.map files are loaded in WAFERMAP
Version 3.55
Release date: Jan 25, 2015
Changes:
- Implementation of Sentec 800 File format for WAFERMAP
Version 3.54
Release date: Sept 21, 2014
Changes:
- Update of file name extension in Save for WAFERMAP DDE connection
Version 3.53
Release date: Jul 13, 2014
Changes:
- Nova 2040 File format update for WAFERMAP
Version 3.52
Release date: Jul 03, 2014
Changes:
- Implementation of automatic scaling in 3D Bar Plot
- Bruker AXS File format update for WAFERMAP
Version 3.51
Release date: Jun 14, 2014
Changes:
- HRP-250 File format implementation for WAFERMAP
- Nova 2040 File format implementation for WAFERMAP
Version 3.50
Release date: May 07, 2014
Changes:
- Scientific format for Plot limits
- Improvements in ploting and copying, more space for plot names
Version 3.49
Release date: Febr 02, 2014
Changes:
- GP-Solar File format implementation for PANELMAP
Version 3.48
Release date: Sept 05, 2013
Changes:
- New setup of implementation package
Version 3.47
Release date: Jul 29, 2013
Changes:
- Parametrized setup for one customer implemented
Version 3.46
Release date: Jul 26, 2013
Changes:
- Implementation of Copy To Clipboard function for Remarks
- Bug fix for printing of Remarks
Version 3.45
Release date: Jul 2, 2013
Changes:
- Implementation of import filter for Bruker AXS in WAFERMAP
Version 3.44
Release date: Apr 5, 2013
Changes:
- Implementation of Bruker AXS import filter
Version 3.43
Release date: Febr 12, 2013
Changes:
- Update of ASCII import filter with "Ignore Line"
Version 3.42
Release date: Dec 17, 2012
Changes:
- Improvement in "Save As" function
Version 3.41
Release date: Oct 29, 2012
Changes:
- Update of Filmetrics import filter
Version 3.40
Release date: Sept 17, 2012
Changes:
- Update of KLA Tencor F5 import filter
- Improvements in tool bar
Version 3.31
Release date: Aug 14, 2012
Changes:
- Update of "Copy To Clipboard" function
Version 3.30
Release date: Febr 27, 2012
Changes:
- Implementation of new WAFERMAP Trial Version
Version 3.20
Release date: Mar 29, 2011
Changes:
- Legend improved
Version 3.16
Release date: Dec 05, 2010
Changes:
- Implementation of new Import for AIT CMT 5000
- New feature to choose size of the Bitmap for "Copy to Clipboard"
- New feature to choose size of the Bitmap for "Save plot to Bitmap"
- Corrections in scaling of plots and pasting of data
Version 3.11
Release date: May 15, 2010
Changes:
- Correction of Contour plot for very small values
- Correction of "Save As"
Version 3.10
Release date: Jan 22, 2010
Changes:
- Implementation of import function for new Four Dimensions 280 file format
- Implementation of "Save As" for unsaved changes
Version 3.9
Release date: Nov 16, 2009
Changes:
- Change of implementation of LCL and UCL in Histogram
Version 3.7
Release date: Jul 25, 2009
Changes:
- Implementation of import function for OMT files
Version 3.6
Release date: Jun 29, 2009
Changes:
- Update of ASCII Import with polar coordinates
Version 3.5.2
Release date: Jun 18, 2009
Changes:
- Update of installation package to solve problems in some Vista environments
- Update of DDE Interface
Version 3.5
Release date: Jun 9, 2009
Changes:
- Update of 3D Bar plot for very small user-defined ranges
- Update of Active-X Interface with new documentation
Version 3.4
Release date: Mar 8, 2009
Changes:
- Implementation of import function for OMS 3000 files
Version 3.3
Release date: Mar 4, 2009
Changes:
- Bug fixes in Plot window max and min
- LCL and UCL for Bar plots
- Update of Network Features
Version 3.1
Release date: Nov 8, 2008
Changes:
- Implementation of import function for Sentech files
- Update of RS-100 Import function for multi-measurement files
- Bug fixes in Edit (OK Button after deletion of last site)
- Legend optimisation in case of values below zero
Version 3.0
Release date: Sept 24, 2008
Changes:
| Title | Description | Group | Type |
|---|---|---|---|
| XML File Format | Implementation of a new WAFERMAP File Format, allowing for multiple data columns, multiple wafers, and extended remarks | Files/ Grids | Improved feature |
| File loading | Option to load multiple columns and wafers at once | Files/ Grids | New feature |
| Picture Export | Export of different picture file formats as e.g. jpg and bmp | Export | New feature |
| HTML-Export | Export of value lists and plots into html-compatible format | Export | New feature |
| Plot Rotation | Free rotation of 3D plots with mouse | Graphics | New feature |
| Colors | Color coding of the 2D Contour Plot (colors as for 2D Color Plot) | Graphics | New feature |
| Contour resolution | 2D Contour Plot: Difference between the lines can be entered as absolute values (e.g. 2 Angstrom) | Graphics | Improved feature |
| Line markers | Line Scan: Set Marker, where measurement sites are crossed by the scan | Graphics | New feature |
| Difference maps | Operations for complete files (e.g. subtraction of "Stacked Map" from all others) | SPC | New feature |
| Plot Standards | "Standard" will be split to allow for resetting of single plot options | Options | Improved feature |
Version 2.14
Release date: Apr 9, 2008
Changes:
Import:
Two new metrology tools are supported now
- Rigaku
- Philips AMS
Version 2.11
Release date: Apr 20, 2007
Changes:
Active X interface:
- New methods provided
Version 2.10
Release date: Aug 04, 2006
Changes:
Import: Filmetrics file import has been upgraded. The following format Versions are supported now in addition:
- Filmetrics File format Version 4
- Filmetrics File format Version 5 including multi-measurement files
Version 2.9
Release date: June 19, 2006
Changes:
Import: Two new metrology tools are supported now:
- Semitek
- Napson WS300
Version 2.8
Release date: Febr 17, 2006
Changes:
Import: Two new metrology tools are supported now:
- KLA -Tencor F5 Ellipsometer
- Rudolph Metapulse
Version 2.7
Release date: Febr 21, 2005
Changes:
Additional features added in the import functionality and the Active-X interface:
- Measurement files of Optiprobe tools with multiple parameter sets and different wafers are supported by WAFERMAP now
- adding of new key word "Points measured:" to the Rudolph file format
- change in file naming for Plasmos imports to allow for Save as
- improvement done for import of very large RS-100 files
- added functionality to the Active-X interface: set and save functions implemented
- improvement in registration functionality for Windows XP users
Version 2.3
Release date: Sept 10, 2003
Changes:
Measurement files of two new metrology tools can be imported and WAFERMAP is released for Windows XP (Prof) now:
- Release for Windows XP Professional
- Import: Two new metrology tools are supported now:
- QC Solutions SCP 7000 and
- FILMetrics Version 3
- 3D Plot: Scaling of the plot after setting plot limits was improved
- Printing: Line Scan Legend was improved
Version 2.2
Release date: Aug 16, 2002
Changes:
The following product improvements and minor bug fixes were done:
- Import: Thermaprobe files with multiple measurements supported now
- Communication/ Linking: More ActiveX methods are supported
- Copy to Clipboard: Additional remarks are copied to the clipboard
- Print: Same legend format in Views and printout
- Print: Problem with undefined standard Windows printer and plot servers resolved
- Edit: Problem with Copy/ Paste in empty files resolved
- SPC: Fix of predefined points outside the actual test diameter
- Contour Plot: Fix of problems with very small wafer samples
Version 2.1
Release date: Mar 19, 2002
Changes:
Together with a number of smaller bug fixes there are some other, minor bug fixes and product improvements.
Among them are:
- Print Header/Footer: Listbox appears now
- General Plot Options: Color changes are now accepted
- General Wafer Data: Flat/ Notch problem solved
- 3D Bar plot: problem with colors fixed
- Printouts: now 4 digits after decimal point on printouts
- Network License: Update tool included
- 3D Plot: problem at 300 mm wafers und resolution 1mm fixed
Version 2.0
Release date: Mar 16, 2001
Changes:
| Title | Description | Group | Type |
|---|---|---|---|
| SPC-Import | Enable imports in the SPC tool | SPC | New feature |
| Stacked Maps | Mean of all Files in the Browser | SPC | New feature |
| Trend Chart | Show histogram for SPC values (Max, Min, Mean, ... of all wafers) on the side | SPC | New feature |
| Browser Print | Enable printing of the Browser | New feature | |
| Print Logo | Enable inclusion of company logo of the customer in the printouts | New feature | |
| Table Print | Print table of all values and coordinates | New feature | |
| Import Polar | Radius Angle Value - ASCII files import | Import | New feature |
| 3D Bar plot | Implement new 3D bar plot | Graphics | New feature |
| Graphics of Actual Values | Show numerical values on the wafer as 2D plot (color coded) | Graphics | New feature |
| Grid Transformation | Transformation of grids (Cartesian, circular) keeping same measurement feature | Files | New feature |
| Folding of Data; Obsolete Points | Do not delete "unused" measurement data (above 3 sigma, errors, etc.), use flag for distinction | Files | New feature |
| Merge | Merge data of different files (e.g. two measurements of one wafer) | Files | New feature |
| Sigma Sorting Filter | Points outside 1, 2, 3 sigma sorting criteria can be eliminated | Files | New feature |
| Interpolation | Enable "Interpolate Value" in Edit | Files | New feature |
| Differential Map | Allow for differentiation of maps (1st derivative, 2nd derivative) to show sources of non homogeneity | Analysis | New feature |
| Faster Algorithms | Improved speed of the algorithms for graphics, especially for high numbers of points | General | Improved feature |
| Browser legend | Show color scale in browser | SPC | Improved feature |
| Trend Chart | Improve graphics | SPC | Improved feature |
| Import Multi wafer Prometrix Files | Prometrix with recognition of multiple files and linesetting | Import | Improved feature |
| 1D Plot Line | Free positioning of the line on the wafer (2 points or point + angle) | Graphics | Improved feature |
| 1D Plot Scal. | Scaleability | Graphics | Improved feature |
| Histogram Resolution | Implement new algorithm | Graphics | Improved feature |
| Color Scales | Allow for user specified scales | Graphics | Improved feature |
| Histogram Scaleable | Scaleability | Graphics | Improved feature |
| WAFERMAP-Format | Allow for scientific format including larger range of values | Files | Improved feature |
Version 1.8
Release date: Jan 17, 2001
Changes:
- Printing: sometimes occuring empty plot windows on printouts corrected
- Files: problems with very tiny wafer diameters resolved (Edit; 2D Plot resolutions)
- DDE: command line commands /SPC and /D implemented for starting SPC and debugging, respectively
Version 1.4
Release date: Jun 18, 2000
Changes:
- Prometrix UV file import: grid corrected
Version 1.3
Release date: Febr 02, 2000
Changes:
- KLA Tencor RS 100 file import: now more robust in case of invalid sites
- Minor bug fixes in 1D Plot and Save As
Version 1.2
Release date: May 17, 1999
Changes:
- Legend added to Copy-to-Clipboard function
New Feature:
- WAFERMAP control through DDE linking added
Version 1.1.1
Release date: Feb 13, 1999
Changes:
- Minor bug fixes
- "n/a" entries in Prometrix UV files are now recognized and according sites are deleted.
New Feature:
- ASCII import added. A simple ASCII text file containing a number of lines in the form: x y value can now be imported. Unit for coordinates is [mm].
Example:
23 -40 100.2
-35 41 101.6
60 -44 101.1
0 -30 99.8
32 12 99.65
Version 1.1.0
Release date: Nov 30, 1998
Changes:
- CDE ResMap import added
- KLA Tencor RS100 import added
- bug at printouts fixed (registered version shows now correct version remark in header and footer
- problem with upper and lower limit in histogram fixed
- improved Rudolph import
- Excel export improved (formatting)
- splash screen at program start can be deactivated
Version 1.0.5
Release date: Sep 30, 1998
Changes:
- Nicolet import improved
- Philips Analytical (Plasmos) import improved (multiple data sets can be imported now)
- 3D plot on printouts contains now legend
- scaling of plots possible with upper and lower limit
- limitation of wafer and test diameter decreased from 50mm downto 1mm
Version 1.0.3
Release date: Aug 26, 1998
Changes:
- OPUS file import improved
Version 1.0.2
Release date: Aug 20, 1998
Changes:
- cut and paste feature added in Editor,
- user defined grids: number if grid points can be entered,
- Operations: Error fixed when no parameter was entered,
Version 1.0.0
Release date: Aug 13, 1998